2026-09-20T09:06:16Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/377662022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Duane Boning, Jeffrey A. Barks.
Altman, Arthur H
Sloan School of Management
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2007-06-28T12:35:04Z
2007-06-28T12:35:04Z
1995
1995
http://hdl.handle.net/1721.1/37766
33213921
Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1995, and Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1995.
Includes bibliographical references (p. 87-89).
by Arthur H. Altman.
M.S.
181 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Sloan School of Management
Electrical Engineering and Computer Science
Applying run-by-run process control to chemical-mechanical planarization and assessing insertion costs versus benefits of CMP
Thesis
application/pdf
Publication
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