2026-09-20T01:19:34Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/402352022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Duane S. Boning.
Smith, Taber H. (Taber Hardesty)
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2008-02-04T21:08:04Z
2008-02-04T21:08:04Z
1996
1996
http://hdl.handle.net/1721.1/40235
35968751
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.
Includes bibliographical references (p. 139-143).
by Taber H. Smith.
M.S.
143 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Novel techniques for the run by run process control of chemical-mechanical polishing
Thesis
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