2026-09-18T21:28:29Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/422532026-06-11T16:15:55Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Henry I. Smith.
Tsai, Hsin-Yu Sidney
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2009-07-01T16:44:25Z
2009-07-01T16:44:25Z
2007
2007
http://hdl.handle.net/1721.1/42253
231635606
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2007.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Includes bibliographical references (p. 91-94).
In this thesis, the concept of absorbance-modulation optical lithography (AMOL) is described, and the feasibility experimentally verified. AMOL is an implementation of nodal lithography, which is not bounded by the diffraction limit of incident lights. Experimental results showed promising capability of AMOL and matched well with simulation. Several key elements of the AMOL system are discussed: the material systems of AMOL, limitations on the material and optical systems presented, and the design and fabrication of spiral phase elements that generate ring-shaped beams required by AMOL.
by Hsin-Yu Sidney Tsai.
S.M.
94 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
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reproduction or distribution in any format is prohibited without written
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http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Absorbance modulation optical lithography
AMOL
Thesis
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