2026-09-19T02:23:44Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/431362022-01-13T07:54:36Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Sang Gook Kim.
Bathurst, Stephen, 1980-
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2008-11-07T19:06:58Z
2008-11-07T19:06:58Z
2008
2008
http://hdl.handle.net/1721.1/43136
247013547
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2008.
Includes bibliographical references (leaves 42-44).
Thus far, use of lead zirconate titanate (PZT) in MEMS has been limited due to the lack of process compatibility with existing MEMS manufacturing techniques. Direct printing of thin films eliminates the need for photolithographic patterning and etching, as well as allows for controlled deposition over non-planar topographies which cannot be accomplished with conventional spin coating processes. This thesis reports the optimal conditions of deposition and crystallization for high dielectric quality PZT thin films via thermal ink jet printing. Included are details of the solution chemistry developed, printing conditions required for MEMS quality films, and thermal processing parameters that enable a strong piezoelectric response.
by Stephen P. Bathurst.
S.M.
57 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
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http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Direct printing of lead zirconate titanate thin films
Direct printing of PZT thin films
Thesis
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