2026-09-19T11:15:24Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/435452022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Martin A. Schmidt.
Hsu, Charles Heng-Yuan, 1967-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2008-11-07T20:10:30Z
2008-11-07T20:10:30Z
1997
1997
http://hdl.handle.net/1721.1/43545
38502766
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.
Includes bibliographical references (leaves 275-282).
by Charles Heng-Yuan Hsu.
Ph.D.
282 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Silicon microaccelerometer fabrication technologies
Thesis
application/pdf
false
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="92d106be-df88-4f39-8cd3-94345cfc2de9">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Silicon microaccelerometer fabrication technologies</Title>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1997</PublicationDate>
<Authors>
<Author>
<DisplayName>Hsu, Charles Heng-Yuan, 1967-</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Electrical Engineering and Computer Science</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>