2026-09-19T00:41:01Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/435752022-01-13T07:54:35Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Jung-Hoon Chun.
Derksen, James Stephen
Massachusetts Institute of Technology. Department of Mechanical Engineering
2008-11-07T20:13:39Z
2008-11-07T20:13:39Z
1997
1997
http://hdl.handle.net/1721.1/43575
39919203
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.
Includes bibliographical references (p. 128-131).
by James Stephen Derksen.
M.S.
131 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering
A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating
Fluid layer overlap in extrusion-spin coating
Thesis
application/pdf
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="f10c7734-f3f9-4aea-b675-ab4d6cb2e2b3">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>A new coating method for semiconductor lithography : fluid layer overlap in extrusion-spin coating</Title>
<Subtitle>Fluid layer overlap in extrusion-spin coating</Subtitle>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1997</PublicationDate>
<Authors>
<Author>
<DisplayName>Derksen, James Stephen</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Mechanical Engineering</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>