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Kamal Youcef-Toumi. Barrett, Lawrence D. (Lawrence David) Massachusetts Institute of Technology. Department of Mechanical Engineering 2008-11-07T20:16:13Z 2008-11-07T20:16:13Z 1997 1997 http://hdl.handle.net/1721.1/43598 42971840 Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997. Includes bibliographical references (p. 161-163). A high precision profilometry system was developed for the quality assurance inspection of twosided samples. Based on system specifications and requirements, atomic force microscopy (AFM) was determined to be the most appropriate profilometry technique. The major components of the device include: (1) A commercially available auto-sensing AFM probe, (2) custom designed probe positioning hardware, (3) sample positioning hardware, (4) probe tip calibration and image processing, and (5) scanned image processing and convolution. The primary focus of this thesis is on the probe positioning hardware design and simulation of the customized profilometer. The design enables the system to simultaneously scan both surfaces of the sample, which increases speed, as well as compensate for distorted samples. The image reconstruction algorithms and system homogeneous transformation matrices (HTMs) are utilized in the simulations of the system. The simulations examine multiple scanning scenarios to determine the necessary requirements of the device to achieve the specified resolution. The system variables available in the simulations are: (1) probe tip contour, (2) actuator specifications, and (3) sample orientation. Finally, recommended device specifications are determined and documented. by Lawrence D. Barrett. S.M. 163 p. eng Massachusetts Institute of Technology M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 Mechanical Engineering Design and simulation of a rapid high percision profilometer Thesis application/pdf Publication unknown unknown <Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="d64e8e97-775e-4ffd-a723-a36a9f39099a"> <Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type> <Language>eng</Language> <Title>Design and simulation of a rapid high percision profilometer</Title> <PublishedIn> <Publication> </Publication> </PublishedIn> <PublicationDate>1997</PublicationDate> <Authors> <Author> <DisplayName>Barrett, Lawrence D. (Lawrence David)</DisplayName> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> </Authors> <Editors> </Editors> <Publishers> <Publisher> <DisplayName>Massachusetts Institute of Technology</DisplayName> <OrgUnit /> </Publisher> </Publishers> <License>http://dspace.mit.edu/handle/1721.1/7582</License> <Keyword>Mechanical Engineering</Keyword> <Abstract>A high precision profilometry system was developed for the quality assurance inspection of twosided samples. Based on system specifications and requirements, atomic force microscopy (AFM) was determined to be the most appropriate profilometry technique. The major components of the device include: (1) A commercially available auto-sensing AFM probe, (2) custom designed probe positioning hardware, (3) sample positioning hardware, (4) probe tip calibration and image processing, and (5) scanned image processing and convolution. The primary focus of this thesis is on the probe positioning hardware design and simulation of the customized profilometer. The design enables the system to simultaneously scan both surfaces of the sample, which increases speed, as well as compensate for distorted samples. The image reconstruction algorithms and system homogeneous transformation matrices (HTMs) are utilized in the simulations of the system. The simulations examine multiple scanning scenarios to determine the necessary requirements of the device to achieve the specified resolution. The system variables available in the simulations are: (1) probe tip contour, (2) actuator specifications, and (3) sample orientation. Finally, recommended device specifications are determined and documented.</Abstract> <Access xmlns="http://purl.org/coar/access_right" > </Access> </Publication>