2026-09-20T01:18:46Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/448192022-01-13T07:54:33Zcom_1721.1_7582com_1721.1_7581col_1721.1_131024
Lionel C. Kimerling.
Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Massachusetts Institute of Technology. Department of Materials Science and Engineering
2009-03-16T19:47:27Z
2009-03-16T19:47:27Z
2007
2007
http://hdl.handle.net/1721.1/44819
301560446
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007.
Includes bibliographical references (p. 49).
This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1.
by Luis Enrique Fernandez.
S.B.
49 p.
eng
Massachusetts Institute of Technology
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http://dspace.mit.edu/handle/1721.1/7582
Materials Science and Engineering.
Design of a CMOS compatible, athermal, optical waveguide
Design of a complementary metal oxide semiconductor compatible, athermal, optical waveguide
Thesis
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<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="b7f7d93c-c833-4bd9-b0c8-e51253353d11">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Design of a CMOS compatible, athermal, optical waveguide</Title>
<Subtitle>Design of a complementary metal oxide semiconductor compatible, athermal, optical waveguide</Subtitle>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>2007</PublicationDate>
<Authors>
<Author>
<DisplayName>Fernandez, Luis Enrique, S.B. Massachusetts Institute of Technology</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Materials Science and Engineering.</Keyword>
<Abstract>This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1.</Abstract>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>