2026-09-20T02:46:06Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/461782022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Rafael Reif.
Cherkassky, Alexander (Alexander Peter), 1963-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2009-06-30T17:43:46Z
2009-06-30T17:43:46Z
1998
1998
http://hdl.handle.net/1721.1/46178
40328627
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (p. 135-139).
by Alexander Cherkassky.
Sc.D.
139 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
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http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Metrology of very thin silicon epitaxial films
Thesis
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