2026-09-18T17:31:46Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/500412022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023col_1721.1_131024
Duane Boning and James Chung.
Park, Tae Hong, 1973-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2009-12-10T19:04:26Z
2009-12-10T19:04:26Z
1998
1998
http://hdl.handle.net/1721.1/50041
40458672
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science; and, Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 73-75).
by Tae Hong Park.
B.S.
M.Eng.
75 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Framework for characterization of copper interconnect in damascene CMP processes
Characterization and modeling of pattern dependent variation in copper damascene CMP processes
Thesis
application/pdf
false
Publication
unknown
unknown
<Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="eef82d06-03e6-499f-baae-989a6797285e">
<Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type>
<Language>eng</Language>
<Title>Framework for characterization of copper interconnect in damascene CMP processes</Title>
<Subtitle>Characterization and modeling of pattern dependent variation in copper damascene CMP processes</Subtitle>
<PublishedIn>
<Publication>
</Publication>
</PublishedIn>
<PublicationDate>1998</PublicationDate>
<Authors>
<Author>
<DisplayName>Park, Tae Hong, 1973-</DisplayName>
<Affiliation>
<OrgUnit>
</OrgUnit>
</Affiliation>
</Author>
</Authors>
<Editors>
</Editors>
<Publishers>
<Publisher>
<DisplayName>Massachusetts Institute of Technology</DisplayName>
<OrgUnit />
</Publisher>
</Publishers>
<License>http://dspace.mit.edu/handle/1721.1/7582</License>
<Keyword>Electrical Engineering and Computer Science</Keyword>
<Access xmlns="http://purl.org/coar/access_right"
>
</Access>
</Publication>