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Jeffrey H. Lang and Bryan Johnson. Machal-Cajigas, Antoinne Y Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science 2010-03-25T15:07:42Z 2010-03-25T15:07:42Z 2009 2009 http://hdl.handle.net/1721.1/53152 505599029 Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2009. Includes bibliographical references (p. 95-97). Microelectromechanical systems known as MEMS, are an enabling technology that describe a field capable of creating very small electromechanical devices with feature sizes on the order of microns, or 10-6 meters. MEMS technology has received considerable attention recently as a way to produce switches. The technology leverages the fabrication instruments, processing and design techniques of the mature integrated circuit (IC) industry. While MEMS technology has shown great successes in producing commercial devices like accelerometers and pressure sensors, the same has not been true for switches. MEMS switches have shown great RF characteristics via low losses and high isolation. However, they possess several important shortcomings. At present, RF MEMS switches have low reliability, limited power handling capabilities, and slow switching times. Nonetheless, MEMS switches are poised to provide advantages over other switching technologies. The goal of this thesis is to understand the limits of their operation and predict their impact in practical applications. To that end, this thesis surveys the present state of the art of MEMS RF switches, identifies the benefits and drawbacks of switches created using this technology, and formulates predictions for the future of MEMS RF switches. by Antoinne Y. Machal-Cajigas. M.Eng. 97 p. eng Massachusetts Institute of Technology M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 Electrical Engineering and Computer Science. RF MEMS switches : survey and analysis Thesis application/pdf false Publication unknown unknown <Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="3d2e3518-9fd9-4635-ae9b-42484cac7075"> <Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type> <Language>eng</Language> <Title>RF MEMS switches : survey and analysis</Title> <PublishedIn> <Publication> </Publication> </PublishedIn> <PublicationDate>2009</PublicationDate> <Authors> <Author> <DisplayName>Machal-Cajigas, Antoinne Y</DisplayName> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> </Authors> <Editors> </Editors> <Publishers> <Publisher> <DisplayName>Massachusetts Institute of Technology</DisplayName> <OrgUnit /> </Publisher> </Publishers> <License>http://dspace.mit.edu/handle/1721.1/7582</License> <Keyword>Electrical Engineering and Computer Science.</Keyword> <Abstract>Microelectromechanical systems known as MEMS, are an enabling technology that describe a field capable of creating very small electromechanical devices with feature sizes on the order of microns, or 10-6 meters. MEMS technology has received considerable attention recently as a way to produce switches. The technology leverages the fabrication instruments, processing and design techniques of the mature integrated circuit (IC) industry. While MEMS technology has shown great successes in producing commercial devices like accelerometers and pressure sensors, the same has not been true for switches. MEMS switches have shown great RF characteristics via low losses and high isolation. However, they possess several important shortcomings. At present, RF MEMS switches have low reliability, limited power handling capabilities, and slow switching times. Nonetheless, MEMS switches are poised to provide advantages over other switching technologies. The goal of this thesis is to understand the limits of their operation and predict their impact in practical applications. To that end, this thesis surveys the present state of the art of MEMS RF switches, identifies the benefits and drawbacks of switches created using this technology, and formulates predictions for the future of MEMS RF switches.</Abstract> <Access xmlns="http://purl.org/coar/access_right" > </Access> </Publication>