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Marc A. Baldo and Francesco Stellacci. Milaninia, Kaveh Mehdi Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. Massachusetts Institute of Technology. Department of Materials Science and Engineering 2010-04-28T17:04:00Z 2010-04-28T17:04:00Z 2009 2009 http://hdl.handle.net/1721.1/54576 568045882 Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2009. Cataloged from PDF version of thesis. Includes bibliographical references (p. 147-153). In this thesis two unique carbon based nanoelectromechanical switches or carbon nano-relays are demonstrated as a toolkit for investigating NEMs based low power switching. The first is a vertical carbon nano-relay, consisting of a vertically aligned carbon nanotube/fiber (CN) between two contacts and operated by pull-off, and the second, a double graphene switch, consisting of two electromechanically actuated stacked layers of polycrystalline graphene. Vertical carbon nano-relays were initially prototyped by inserting a CN between two contacts through the use of a nanopositioner. The prototype demonstrated pull-off operation and multiple switching. To our knowledge this is the only example to date of a multiple-use NEMs switch that operates with pull-off. Next a wafer integrated device was fabricated. Although pull-in was demonstrated in these integrated devices, pull-off was not possible primarily due to limitations in CN growth, which were also investigated. In the work on a double graphene switch we demonstrated an electromechanical switch comprising two polycrystalline graphene films, each deposited using ambient pressure chemical vapor deposition (CVD). The top film is pulled into electrical contact with the bottom film by application of approximately 5V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of multiple switching at low voltage confirms that graphene is an attractive material for electromechanical switches. by Kaveh Mehdi Milaninia. Ph.D. 153 p. eng Massachusetts Institute of Technology M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 Materials Science and Engineering. Carbon nano-relays for low power switching Thesis application/pdf false Publication unknown unknown <Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="841c23e3-0bdf-412b-9a78-9ff6ab17aeeb"> <Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type> <Language>eng</Language> <Title>Carbon nano-relays for low power switching</Title> <PublishedIn> <Publication> </Publication> </PublishedIn> <PublicationDate>2009</PublicationDate> <Authors> <Author> <DisplayName>Milaninia, Kaveh Mehdi</DisplayName> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> </Authors> <Editors> </Editors> <Publishers> <Publisher> <DisplayName>Massachusetts Institute of Technology</DisplayName> <OrgUnit /> </Publisher> </Publishers> <License>http://dspace.mit.edu/handle/1721.1/7582</License> <Keyword>Materials Science and Engineering.</Keyword> <Abstract>In this thesis two unique carbon based nanoelectromechanical switches or carbon nano-relays are demonstrated as a toolkit for investigating NEMs based low power switching. The first is a vertical carbon nano-relay, consisting of a vertically aligned carbon nanotube/fiber (CN) between two contacts and operated by pull-off, and the second, a double graphene switch, consisting of two electromechanically actuated stacked layers of polycrystalline graphene. Vertical carbon nano-relays were initially prototyped by inserting a CN between two contacts through the use of a nanopositioner. The prototype demonstrated pull-off operation and multiple switching. To our knowledge this is the only example to date of a multiple-use NEMs switch that operates with pull-off. Next a wafer integrated device was fabricated. Although pull-in was demonstrated in these integrated devices, pull-off was not possible primarily due to limitations in CN growth, which were also investigated. In the work on a double graphene switch we demonstrated an electromechanical switch comprising two polycrystalline graphene films, each deposited using ambient pressure chemical vapor deposition (CVD). The top film is pulled into electrical contact with the bottom film by application of approximately 5V between the layers. Contact is broken by mechanical restoring forces after bias is removed. The device switches several times before tearing. Demonstration of multiple switching at low voltage confirms that graphene is an attractive material for electromechanical switches.</Abstract> <Access xmlns="http://purl.org/coar/access_right" > </Access> </Publication>