2026-09-18T23:41:44Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/619122022-01-13T07:54:36Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Kamal Youcef-Toumi.
Lim, Kwang Yong, S.M. Massachusetts Institute of Technology
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2011-03-24T20:25:40Z
2011-03-24T20:25:40Z
2010
2010
http://hdl.handle.net/1721.1/61912
707090925
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2010.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 191-192).
This thesis presents the design and development of an optical cantilever deflection sensor for a high speed Atomic Force Microscope (AFM). This optical sensing system is able to track a small cantilever while the X-Y scanner moves in the X-Y plane at 1KHz over a large range of 50x50 microns. To achieve these requirements, we evaluated a number of design concepts among which the lever method and the fiber collimator method were selected. Experiments were performed to characterize the performance of the integrated AFM and to show that the cantilever tracking while the scanner is in operation was accomplished. A triangular grating was imaged with the lever method optical subassembly integrated with the scanner to demonstrate the effectiveness of the approach.
by Kwang Yong Lim.
S.M.
192 p.
eng
Massachusetts Institute of Technology
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http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Optical system for high-speed Atomic Force Microscope
Optical system for high-speed AFM
Thesis
application/pdf
Publication
unknown
unknown
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