2026-09-19T04:08:36Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/626052022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Karl K. Berggren and Vivek K Goyal.
Snella, Michael T
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2011-05-09T13:59:40Z
2011-05-09T13:59:40Z
2010
2010
http://hdl.handle.net/1721.1/62605
714248663
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2010.
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
Cataloged from student submitted PDF version of thesis.
Includes bibliographical references (p. 91-92).
Scanning electron micrographs at high magnification (100,000x and up) are distorted by motion of the sample during image acquisition, a phenomenon called drift. We propose a method for correcting drift distortion in images obtained on scanning electron and other scanned-beam microscopes by registering a series of images to create a drift-free composite. We develop a drift-distortion model for linear drift and use it as a basis for an affine correction between images in the sequence. The performance of our correction method is evaluated with simulated datasets and real datasets taken on both scanning electron and scanning helium-ion microscopes; we compare performance against translation only correction. In simulation, we exhibit a 12.5 dB improvement in SNR of our drift-corrected composite compared to a non-aligned composite, and a 3 dB improvement over translation correction. A more modest 0.4 dB improvement is measured on the real image sets compared to translation correction alone.
by Michael T. Snella.
M.Eng.
92 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
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http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Drift correction for scanning-electron microscopy
Thesis
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<Abstract>Scanning electron micrographs at high magnification (100,000x and up) are distorted by motion of the sample during image acquisition, a phenomenon called drift. We propose a method for correcting drift distortion in images obtained on scanning electron and other scanned-beam microscopes by registering a series of images to create a drift-free composite. We develop a drift-distortion model for linear drift and use it as a basis for an affine correction between images in the sequence. The performance of our correction method is evaluated with simulated datasets and real datasets taken on both scanning electron and scanning helium-ion microscopes; we compare performance against translation only correction. In simulation, we exhibit a 12.5 dB improvement in SNR of our drift-corrected composite compared to a non-aligned composite, and a 3 dB improvement over translation correction. A more modest 0.4 dB improvement is measured on the real image sets compared to translation correction alone.</Abstract>
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