2026-09-20T10:39:22Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/704282022-01-13T07:54:36Zcom_1721.1_7582com_1721.1_7581col_1721.1_131024
Martin L. Culpepper.
Daniel, Cody R
Sepp, Toomas R
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2012-04-26T18:52:31Z
2012-04-26T18:52:31Z
2011
2011
http://hdl.handle.net/1721.1/70428
785209605
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2011.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 48).
Development of the design, manufacture, and testing for a gas flow regulating microvalve is presented herein. The microvalve project served as a test bed for new micromachining techniques and for exploration of MEMS devices made from non-silicon materials. We developed and tested a novel microvalve utilizing a passive mechanical membrane that allows for accurate flow rate control over a wide range of inlet pressures, requiring power only to adjust the flow rate. Design considerations and functional analysis of a microvalve system are discussed, and manufacturing techniques analyzed. The design was verified by comparing the prototyped system to a commercially available mini ball valve. The valves were run through full actuation at varying pressures and the resulting flow was observed and characterized. At 0.69 MPa, the flexure valve prototype was shown to allow adjustments in flow between 1.0* 10-6 and 2.0* 106 m3/s over the period of about 8 seconds, allowing for a precision adjustment of flow not available in other valves. The experiment demonstrates that the new microvalve offers significant advantages in terms of a wider range of flow rate adjustment available within the operating pressure regime.
by Cody R. Daniel and Toomas R. Sepp.
S.B.
54 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
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http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Design and testing of a microvalve capable of precisely controlling low fluidic flow rates
Thesis
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<Abstract>Development of the design, manufacture, and testing for a gas flow regulating microvalve is presented herein. The microvalve project served as a test bed for new micromachining techniques and for exploration of MEMS devices made from non-silicon materials. We developed and tested a novel microvalve utilizing a passive mechanical membrane that allows for accurate flow rate control over a wide range of inlet pressures, requiring power only to adjust the flow rate. Design considerations and functional analysis of a microvalve system are discussed, and manufacturing techniques analyzed. The design was verified by comparing the prototyped system to a commercially available mini ball valve. The valves were run through full actuation at varying pressures and the resulting flow was observed and characterized. At 0.69 MPa, the flexure valve prototype was shown to allow adjustments in flow between 1.0* 10-6 and 2.0* 106 m3/s over the period of about 8 seconds, allowing for a precision adjustment of flow not available in other valves. The experiment demonstrates that the new microvalve offers significant advantages in terms of a wider range of flow rate adjustment available within the operating pressure regime.</Abstract>
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