2026-09-23T18:13:52Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/781872026-06-06T01:04:09Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Jung-Hoon Chun.
Lee, Jun B., M. Eng. (Jun Bum). Massachusetts Institute of Technology
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2013-03-28T18:12:37Z
2013-03-28T18:12:37Z
2012
2012
http://hdl.handle.net/1721.1/78187
830026900
Thesis (M. Eng. in Manufacturing)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2012.
Cataloged from PDF version of thesis.
Includes bibliographical references (p. 80).
by Jun Bum Lee.
M.Eng. in Manufacturing
80 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film PZT fabrication processes
Determining the root causes of excess metal and void defects with respect to the photoresist quality in thin film lead zirconate titanate fabrication processes
Thesis
application/pdf
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Publication
unknown
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