2026-09-20T12:31:38Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/801072026-06-05T20:27:11Zcom_1721.1_7582com_1721.1_7581col_1721.1_131024
Duane S. Boning.
Nishimoto, Angie Shizue, 1977-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2013-08-22T18:51:55Z
2013-08-22T18:51:55Z
1999
1999
http://hdl.handle.net/1721.1/80107
43555718
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaf 40).
by Angie Shizue Nishimoto.
S.B.
M.Eng.
40 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Assessment of an infrared camera for use as a control sensor for the chemical mechanical planarization process
Assessment of an infrared camera for use as a control sensor for the CMP
Assessment of an infrared sensor for control of chemical mechanical planarization
Thesis
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