2026-09-19T18:45:34Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/801092022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Duane Boning and James Chung.
Oji, Charles (Charles Ojih), 1974-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2013-08-22T18:52:03Z
2013-08-22T18:52:03Z
1999
1999
http://hdl.handle.net/1721.1/80109
43556183
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaves 55-56).
by Charles Oji.
M.Eng.
91 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Characterization and modeling of uniformity in chemical mechanical polishing
Characterization and modeling in chemical mechanical polishing processes
Thesis
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