2026-09-19T18:45:58Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/802452026-06-06T01:04:16Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Herbert H. Swain.
Lane, Jennifer M. (Jennifer Marie), 1977-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2013-08-22T19:01:22Z
2013-08-22T19:01:22Z
1999
1999
http://hdl.handle.net/1721.1/80245
48206466
Thesis (M.Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaves 91-94).
by Jennifer M. Lane.
M.Eng.
S.B.
110 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
A fundamental study of feature evolution during high density plasma etching
Feature evolution during high density plasma etching
Thesis
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