2026-09-24T07:57:25Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/84602022-01-13T07:54:33Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Merton C. Flemings.
Hastings, Abel Z., 1973-
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Massachusetts Institute of Technology. Department of Materials Science and Engineering
2005-08-23T20:21:21Z
2005-08-23T20:21:21Z
2002
2002
http://hdl.handle.net/1721.1/8460
50679979
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.
Includes bibliographical references (p. 85-89).
An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, micro-injection molding, metal injection molding, Microforming, and microextrusion. This study presents a technique overview, assembly issues, an applications survey, basic cost modeling and a survey of the relevant intellectual property.
by Abel Z. Hastings.
M.Eng.
89 p.
7583779 bytes
7583534 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Materials Science and Engineering.
Assessing the viability of various metallic microfabrication techniques
Thesis
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