2026-09-24T14:37:55Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/853242022-01-13T07:55:22Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Herbert H. Swain.
Kwon, Ohseung, 1969-
Massachusetts Institute of Technology. Department of Materials Science and Engineering.
Massachusetts Institute of Technology. Department of Materials Science and Engineering
2014-03-06T15:33:42Z
2014-03-06T15:33:42Z
1999
1999
http://hdl.handle.net/1721.1/85324
43933953
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.
Includes bibliographical references (leaves 50-51).
by Ohseung Kwon.
S.M.
51 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Materials Science and Engineering.
Post oxide etching cleaning process using integrated ashing and HF vapor process
Thesis
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