2026-09-19T11:17:19Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/853252022-01-13T07:55:22Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Gerald Benard and Klavs F. Jensen.
Levis, Kim-Marie, 1976-
Massachusetts Institute of Technology. Department of Materials Science and Engineering.
Massachusetts Institute of Technology. Department of Materials Science and Engineering
2014-03-06T15:33:47Z
2014-03-06T15:33:47Z
1999
1999
http://hdl.handle.net/1721.1/85325
43936916
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.
Includes bibliographical references (leaf 53).
by Kim-Marie Levis.
S.M.
57 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Materials Science and Engineering.
Screening experiment for a polysilicon gate etch chamber
Thesis
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