2026-09-21T03:46:52Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/854612026-06-16T18:55:14Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Henry I. Smith.
Fucetola, Corey Patrick
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2014-03-06T15:43:41Z
2014-03-06T15:43:41Z
2013
2013
http://hdl.handle.net/1721.1/85461
870969053
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2013.
Cataloged from PDF version of thesis.
Includes bibliographical references (pages 153).
This thesis considers the viability of nanomembrane handling and stacking approaches to enable the fabrication of three-dimensional (3D) nano-structured materials. Sequentially stacking previously-patterned membranes to build up 3D nanostructures, e.g. photonic crystals, is a powerful technique that decouples serial patterning processes from 3D assembly, allows the incorporation of photonic devices into the material and facilitates in-process error inspection. A technique identified to address the fundamental problems with stacking disjoined membranes, i.e. those populated with photonic devices, using water-based approaches was an outgrowth of methods to fabricate, handle and stack their connected counterparts. Initially, connected nanomembranes patterned in a thin layer of silicon on glass were released in hydrofluoric acid where surface tension caused them to float flat. Their fragility inspired novel handling and position manipulation techniques for layer-to-layer alignment. While exploiting surface tension allowed membranes to be stacked using water, drifting precluded precision placement. Although carrier substrates held them stationary, the membranes leaked water before Van-der Waals adhesion was overcome. To address such issues a novel method is introduced whereby a sublimable glue affixes membranes to a glass carrier, which is placed membrane-side down onto a receiving substrate and the glue is vaporized to detach the membranes, leaving them bound to the previous layer.
by Corey Patrick Fucetola.
Ph.D.
153 pages
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Three-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
3-dimensional nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
3D nanostructures fabricated by stacking pre-patterned monocrystalline silicon nanomembranes
Thesis
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<Abstract>This thesis considers the viability of nanomembrane handling and stacking approaches to enable the fabrication of three-dimensional (3D) nano-structured materials. Sequentially stacking previously-patterned membranes to build up 3D nanostructures, e.g. photonic crystals, is a powerful technique that decouples serial patterning processes from 3D assembly, allows the incorporation of photonic devices into the material and facilitates in-process error inspection. A technique identified to address the fundamental problems with stacking disjoined membranes, i.e. those populated with photonic devices, using water-based approaches was an outgrowth of methods to fabricate, handle and stack their connected counterparts. Initially, connected nanomembranes patterned in a thin layer of silicon on glass were released in hydrofluoric acid where surface tension caused them to float flat. Their fragility inspired novel handling and position manipulation techniques for layer-to-layer alignment. While exploiting surface tension allowed membranes to be stacked using water, drifting precluded precision placement. Although carrier substrates held them stationary, the membranes leaked water before Van-der Waals adhesion was overcome. To address such issues a novel method is introduced whereby a sublimable glue affixes membranes to a glass carrier, which is placed membrane-side down onto a receiving substrate and the glue is vaporized to detach the membranes, leaving them bound to the previous layer.</Abstract>
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