2026-09-22T16:08:38Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/86252022-01-13T07:54:23Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Jacob White and Keven Amaratunga.
Ramaswamy, Deepak, 1974-
Massachusetts Institute of Technology. Dept. of Civil and Environmental Engineering.
Massachusetts Institute of Technology. Department of Civil and Environmental Engineering
2005-08-23T21:49:01Z
2005-08-23T21:49:01Z
2001
2001
http://hdl.handle.net/1721.1/8625
49522922
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2001.
Includes bibliographical references (p. 101-104).
In this thesis efficient techniques to solve complex 3-D electromechanical problems are developed. Finite element discretization of complex structures such as the micromirror lead to thousands of internal degrees of freedom. Their mostly rigid motion is exploited leading to a mixed rigid-elastic formulation. This formulation's advantage is apparent when it is incorporated in an efficient coupled domain simulation technique and examples are presented exploring geometry effects on device behavior. Then for system level simulation where full device simulation costs add up we need models with much reduced order with little degradation in accuracy. We describe a model reduction formulation for the electromechanical problem based on implicit techniques which accurately capture the original model behavior.
by Deepak Ramaswamy.
Ph.D.
104 leaves
5760284 bytes
5760038 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Civil and Environmental Engineering.
Simulation tools for microelectromechanical systems
Simulation tools for MEMS
Thesis
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