2026-09-20T13:44:57Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/866682022-01-13T07:54:01Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
Rafael Reif.
Pruette, Laura C. (Laura Catherine), 1974-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2014-05-07T16:56:54Z
2014-05-07T16:56:54Z
2001
2001
http://hdl.handle.net/1721.1/86668
49201932
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2001.
Includes bibliographical references (p. 295-301).
by Laure C. Pruette.
Ph.D.
301 p.
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science.
Oxide etching with NF₃ hydrocarbon chemistries for global warming emissions reduction
Thesis
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