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Nam P. Suh. Lee, Kwangduk Douglas, 1970- Massachusetts Institute of Technology. Dept. of Mechanical Engineering. Massachusetts Institute of Technology. Department of Mechanical Engineering 2005-08-23T15:36:39Z 2005-08-23T15:36:39Z 2000 2000 http://hdl.handle.net/1721.1/8821 48379402 Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. Includes bibliographical references (leaf 140). Axiomatic Design is presented as a scientific methodology in designing a complex machine control system. As an example, the CMP a machine control system is developed using the Axiomatic Design framework. The machine is a type of semiconductor processing equipment, which requires numerous actuators and sensors and the intelligent control of them to planarize thin layers of wafers. Signal processing modules, control algorithms, sequential process steps, graphical user interface, process recipe editor and the overall control system structure are all designed by the Axiomatic decomposition. Axiomatic Design is proved to be a very effective tool in control system development. It took less than six months to develop the system and the control system is fully functional without any major error or mistake. The resulting system is clear to understand, easy to maintain and upgrade, and flexible for further development and integration. Although the development has been specific to the CMP cc machine, the control system structure and the design methodologies presented in this thesis are universally applicable to the development of any type of machine control system. by Kwangduk Douglas Lee. S.M. 140 leaves 14521954 bytes 14521712 bytes application/pdf application/pdf eng Massachusetts Institute of Technology M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 Mechanical Engineering. Axiomatic development of a machine control system Thesis application/pdf Publication unknown unknown <Publication xmlns="https://www.openaire.eu/cerif-profile/1.1/" id="964a4033-b921-401f-8f6a-34abb3970d77"> <Type xmlns="https://www.openaire.eu/cerif-profile/vocab/COAR_Publication_Types">http://purl.org/coar/resource_type/c_1843</Type> <Language>eng</Language> <Title>Axiomatic development of a machine control system</Title> <PublishedIn> <Publication> </Publication> </PublishedIn> <PublicationDate>2000</PublicationDate> <Authors> <Author> <DisplayName>Lee, Kwangduk Douglas, 1970-</DisplayName> <Affiliation> <OrgUnit> </OrgUnit> </Affiliation> </Author> </Authors> <Editors> </Editors> <Publishers> <Publisher> <DisplayName>Massachusetts Institute of Technology</DisplayName> <OrgUnit /> </Publisher> </Publishers> <License>http://dspace.mit.edu/handle/1721.1/7582</License> <Keyword>Mechanical Engineering.</Keyword> <Abstract>Axiomatic Design is presented as a scientific methodology in designing a complex machine control system. As an example, the CMP a machine control system is developed using the Axiomatic Design framework. The machine is a type of semiconductor processing equipment, which requires numerous actuators and sensors and the intelligent control of them to planarize thin layers of wafers. Signal processing modules, control algorithms, sequential process steps, graphical user interface, process recipe editor and the overall control system structure are all designed by the Axiomatic decomposition. Axiomatic Design is proved to be a very effective tool in control system development. It took less than six months to develop the system and the control system is fully functional without any major error or mistake. The resulting system is clear to understand, easy to maintain and upgrade, and flexible for further development and integration. Although the development has been specific to the CMP cc machine, the control system structure and the design methodologies presented in this thesis are universally applicable to the development of any type of machine control system.</Abstract> <Access xmlns="http://purl.org/coar/access_right" > </Access> </Publication>