2026-09-21T07:40:59Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/892852022-01-13T07:54:05Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Ernesto E. Blanco.
Hashemi, Fardad Ali, 1976-
Massachusetts Institute of Technology. Department of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2014-09-09T17:51:41Z
2014-09-09T17:51:41Z
2000
2000
http://hdl.handle.net/1721.1/89285
46310295
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000.
Includes bibliographical references (leaf 208).
by Fardad Ali Hashemi.
S.M.
208 leaves
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Design of a precision chemical mechanical planarization research system
Thesis
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