2026-09-23T23:32:01Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/93152022-01-13T07:54:36Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
David L. Trumper.
Konkola, Paul Thomas, 1973-
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-08-22T20:15:53Z
2005-08-22T20:15:53Z
1998
1998
http://hdl.handle.net/1721.1/9315
44021880
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
Includes bibliographical references (p. 217-220).
by Paul Thomas Konkola.
S.M.
230 p.
14041316 bytes
14041076 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering.
Magnetic bearing stages for electron beam lithography
Thesis
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