2026-09-28T00:04:05Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/94732021-07-05T14:03:20Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Donald E. Troxel.
Rodríguez, Ramón L. (Ramón Luis), 1976-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-22T18:38:25Z
2005-08-22T18:38:25Z
1999
1999
http://hdl.handle.net/1721.1/9473
43558977
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
Includes bibliographical references (leaves 89-90).
Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes and the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on.
by Ramón L. Rodríguez.
M.Eng.
90 leaves
3658531 bytes
3658286 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
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http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Performance measurements of MEMS analysis system
Performance measurements of micro electromechanical systems analysis system
Thesis
application/pdf
Publication
unknown
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