2026-09-24T22:53:20Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/98502022-01-13T07:54:35Zcom_1721.1_7582com_1721.1_7581col_1721.1_131022
David L. Trumper.
Williams, Mark E. (Mark Edd)
Massachusetts Institute of Technology. Department of Mechanical Engineering
2005-08-19T16:18:31Z
2005-08-19T16:18:31Z
1997
1998
http://hdl.handle.net/1721.1/9850
41357016
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.
Includes bibliographical references (leaves 221-225).
by Mark Edd Williams.
Ph.D.
257 leaves
15235679 bytes
15235432 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Mechanical Engineering
Precision six degrees of freedom magnetically-levitated photolithography stage
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