2026-09-24T21:50:19Zhttps://dspace.mit.edu/server/oai/requestoai:dspace.mit.edu:1721.1/99452022-01-13T07:54:29Zcom_1721.1_7582com_1721.1_7581col_1721.1_131023
Stephen D. Senturia.
Deutsch, Erik R. (Erik Robertson), 1974-
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
2005-08-19T14:26:17Z
2005-08-19T14:26:17Z
1998
1998
http://hdl.handle.net/1721.1/9945
40265284
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
Includes bibliographical references (leaves 45-46).
by Erik R. Deutsch.
M.S.
48 leaves
3672086 bytes
3671844 bytes
application/pdf
application/pdf
eng
Massachusetts Institute of Technology
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.
http://dspace.mit.edu/handle/1721.1/7582
Electrical Engineering and Computer Science
Development of calibration standards for accurate measurement of geometry in microelectromechanical systems
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