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DLTS characterization of aluminum gettering of iron contaminants in boron-doped silicon

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DLTS characterization of aluminum gettering of iron contaminants in boron-doped silicon

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Alternative Title: Deep level transient spectrosopy of aluminum gettering of iron contaminants in boron-doped silicon.
Author: Thienprasit, Jeanne A. (Jeanne Athya)
Department: Massachusetts Institute of Technology. Dept. of Physics
Publisher: Massachusetts Institute of Technology
Date Issued: 1996
Description:
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Physics, 1996.Includes bibliographical references.
URI: http://hdl.handle.net/1721.1/10613
Keywords: Physics

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