Real-time analysis and control of plasma etching via full wafer interferometry
Author(s)
Wong, Ka Shun
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Advisor
Duane S. Boning.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996. Includes bibliographical references (p. 132-137).
Date issued
1996Department
Massachusetts Institute of Technology. Department of Mechanical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Mechanical Engineering