Precision machine design for the semiconductor equipment manufacturing industry
Citable URI:
http://hdl.handle.net/1721.1/11496
| Title: | Precision machine design for the semiconductor equipment manufacturing industry |
| Author: | Van Doren, Matthew J., 1967- |
| Advisor: | Alexander Slocum. |
| Department: | Massachusetts Institute of Technology. Dept. of Mechanical Engineering |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1995 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995. Vita. Includes bibliographical references (p. 293-301). |
| URI: | http://hdl.handle.net/1721.1/11496 |
| Keywords: | Mechanical Engineering |
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