Advanced Search
DSpace@MIT

Beam alignment and image metrology for scanning beam interference lithography : fabricating gratings with nanometer phase accuracy

Research and Teaching Output of the MIT Community

Files in this item

Name Size Format Description
53278759.pdf 8.610Mb PDF Preview, non-printable (open to all)
53278759-MIT.pdf 8.609Mb PDF Full printable version (MIT only)

This item appears in the following Collection(s)

MIT-Mirage