Advanced Search

Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions

Research and Teaching Output of the MIT Community

Files in this item

Name Size Format Description
53372052.pdf 9.388Mb PDF Preview, non-printable (open to all)
53372052-MIT.pdf 9.388Mb PDF Full printable version (MIT only)

This item appears in the following Collection(s)