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Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas

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dc.contributor.advisor Herbert H. Sawin. en_US Liu, Joanne en_US 2006-02-02T18:41:44Z 2006-02-02T18:41:44Z 1993 en_US 1993 en_US
dc.description Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1993. en_US
dc.description Includes bibliographical references (p. 207-213). en_US
dc.description.statementofresponsibility by Joanne Liu. en_US
dc.format.extent 495 p. en_US
dc.format.extent 19590818 bytes
dc.format.extent 19660224 bytes
dc.format.mimetype application/pdf
dc.format.mimetype application/pdf
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.subject Chemical Engineering en_US
dc.title Scaling relationships for power deposition and ion bombardment in radio-frequency plasmas en_US
dc.type Thesis en_US Ph.D. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Chemical Engineering en_US
dc.identifier.oclc 28153004 en_US

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