Real time interferometric imaging of the plasma etch process
Author(s)
Claman, Jonathan L. (Jonathan Leonard)
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Advisor
Duane S. Boning.
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Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (leaves 51-52).
Date issued
1994Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science