dc.contributor.author | Pitera, Arthur J. | |
dc.contributor.author | Groenert, M. E. | |
dc.contributor.author | Yang, V. K. | |
dc.contributor.author | Lee, Minjoo L. | |
dc.contributor.author | Leitz, Christopher W. | |
dc.contributor.author | Taraschi, G. | |
dc.contributor.author | Cheng, Zhiyuan | |
dc.contributor.author | Fitzgerald, Eugene A. | |
dc.date.accessioned | 2003-11-20T22:05:13Z | |
dc.date.available | 2003-11-20T22:05:13Z | |
dc.date.issued | 2003-01 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/3714 | |
dc.description.abstract | A research synopsis is presented summarizing work with integration of Ge and III-V semiconductors and optical devices with Si. III-V GaAs/AlGaAs quantum well lasers and GaAs/AlGaAs optical circuit structures have been fabricated on Si using Ge/GeSi/Si virtual substrates. The lasers fabricated on bulk GaAs showed similar output characteristics as those on Si. The GaAs/AlGaAs lasers fabricated on Si emitted at 858nm and had room temperature cw lifetimes of ~4hours. Straight optical links integrating an LED emitter, waveguide and detector exhibited losses of approximately 144dB/cm. A process for fabrication of a novel CMOS-compatible platform that integrates III-V or Ge layers with Si is demonstrated. Thin Ge layers have been transferred from Ge/GeSi/Si virtual substrates to bulk Si utilizing wafer bonding and an epitaxial Si CMP layer to facilitate virtual substrate planarization. A unique CMP-less method for removal of Ge exfoliation damage induced by the SmartCut⢠process is also presented. | en |
dc.description.sponsorship | Singapore-MIT Alliance (SMA) | en |
dc.format.extent | 886237 bytes | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_US | |
dc.relation.ispartofseries | Advanced Materials for Micro- and Nano-Systems (AMMNS); | |
dc.subject | chemo-mechanical planarization | en |
dc.subject | GaAs/AlGaAs lasers | en |
dc.subject | GeSi virtual substrates | en |
dc.subject | optical circuit | en |
dc.subject | wafer bonding | en |
dc.title | Novel CMOS-Compatible Optical Platform | en |
dc.type | Article | en |