Advanced Search
DSpace@MIT

Novel CMOS-Compatible Optical Platform

Research and Teaching Output of the MIT Community

Planned maintenance alert - Monday, April 21: DSpace@MIT will undergo maintenance activities that will affect service availability and access to file content. While the service interruptions should be brief, access to file content may take longer to restore. Status updates will be posted to http://3down.mit.edu/.

Show simple item record

dc.contributor.author Pitera, Arthur J.
dc.contributor.author Groenert, M. E.
dc.contributor.author Yang, V. K.
dc.contributor.author Lee, Minjoo L.
dc.contributor.author Leitz, Christopher W.
dc.contributor.author Taraschi, G.
dc.contributor.author Cheng, Zhiyuan
dc.contributor.author Fitzgerald, Eugene A.
dc.date.accessioned 2003-11-20T22:05:13Z
dc.date.available 2003-11-20T22:05:13Z
dc.date.issued 2003-01
dc.identifier.uri http://hdl.handle.net/1721.1/3714
dc.description.abstract A research synopsis is presented summarizing work with integration of Ge and III-V semiconductors and optical devices with Si. III-V GaAs/AlGaAs quantum well lasers and GaAs/AlGaAs optical circuit structures have been fabricated on Si using Ge/GeSi/Si virtual substrates. The lasers fabricated on bulk GaAs showed similar output characteristics as those on Si. The GaAs/AlGaAs lasers fabricated on Si emitted at 858nm and had room temperature cw lifetimes of ~4hours. Straight optical links integrating an LED emitter, waveguide and detector exhibited losses of approximately 144dB/cm. A process for fabrication of a novel CMOS-compatible platform that integrates III-V or Ge layers with Si is demonstrated. Thin Ge layers have been transferred from Ge/GeSi/Si virtual substrates to bulk Si utilizing wafer bonding and an epitaxial Si CMP layer to facilitate virtual substrate planarization. A unique CMP-less method for removal of Ge exfoliation damage induced by the SmartCutâ„¢ process is also presented. en
dc.description.sponsorship Singapore-MIT Alliance (SMA) en
dc.format.extent 886237 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.relation.ispartofseries Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject chemo-mechanical planarization en
dc.subject GaAs/AlGaAs lasers en
dc.subject GeSi virtual substrates en
dc.subject optical circuit en
dc.subject wafer bonding en
dc.title Novel CMOS-Compatible Optical Platform en
dc.type Article en


Files in this item

Name Size Format Description
AMMNS021.pdf 865.4Kb PDF

This item appears in the following Collection(s)

Show simple item record

MIT-Mirage