Fabrication of distortion free x-ray masks using low stress tungsten
Citable URI:
http://hdl.handle.net/1721.1/39038
| Title: | Fabrication of distortion free x-ray masks using low stress tungsten |
| Author: | Ku, Yao-Ching |
| Advisor: | Henry I. Smith. |
| Department: | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1992 |
| Description: |
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1992. Includes bibliographical references (leaves 113-115). |
| URI: | http://hdl.handle.net/1721.1/39038 |
| Keywords: | Electrical Engineering and Computer Science |
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