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A Novel Testing Apparatus for Tribological Studies at the Small Scale

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dc.contributor.author Gearing, B.P.
dc.contributor.author Anand, Lallit
dc.date.accessioned 2003-12-22T20:40:48Z
dc.date.available 2003-12-22T20:40:48Z
dc.date.issued 2002-01
dc.identifier.uri http://hdl.handle.net/1721.1/3982
dc.description.abstract A novel flexure-based biaxial compression/shear apparatus has been designed, built, and utilized to conduct tribological studies of interfaces relevant to MEMS. Aspects of our new apparatus are detailed and its capabilities are demonstrated by an investigation of two interfaces for MEMS applications. Tribological tests may be performed with normal and tangential forces in the µN to N range and relative sliding displacements in the nm to mm range. In this testing range, the new experimental apparatus represents an improvement over existing techniques for tribological studies at the small scale. en
dc.description.sponsorship Singapore-MIT Alliance (SMA) en
dc.format.extent 3396989 bytes
dc.format.mimetype application/pdf
dc.language.iso en_US
dc.relation.ispartofseries Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject MEMS en
dc.subject friction en
dc.subject mechanical testing en
dc.title A Novel Testing Apparatus for Tribological Studies at the Small Scale en
dc.type Article en


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