A Novel Testing Apparatus for Tribological Studies at the Small Scale

dc.contributor.author	Gearing, B.P.
dc.contributor.author	Anand, Lallit
dc.date.accessioned	2003-12-22T20:40:48Z
dc.date.available	2003-12-22T20:40:48Z
dc.date.issued	2002-01
dc.identifier.uri	http://hdl.handle.net/1721.1/3982
dc.description.abstract	A novel flexure-based biaxial compression/shear apparatus has been designed, built, and utilized to conduct tribological studies of interfaces relevant to MEMS. Aspects of our new apparatus are detailed and its capabilities are demonstrated by an investigation of two interfaces for MEMS applications. Tribological tests may be performed with normal and tangential forces in the µN to N range and relative sliding displacements in the nm to mm range. In this testing range, the new experimental apparatus represents an improvement over existing techniques for tribological studies at the small scale.	en
dc.description.sponsorship	Singapore-MIT Alliance (SMA)	en
dc.format.extent	3396989 bytes
dc.format.mimetype	application/pdf
dc.language.iso	en_US
dc.relation.ispartofseries	Advanced Materials for Micro- and Nano-Systems (AMMNS);
dc.subject	MEMS	en
dc.subject	friction	en
dc.subject	mechanical testing	en
dc.title	A Novel Testing Apparatus for Tribological Studies at the Small Scale	en
dc.type	Article	en