Semiconductor fabrication capacity gains through optimal allocation of product loadings and equipment sharing across process technologies
Citable URI:
http://hdl.handle.net/1721.1/42657
| Title: | Semiconductor fabrication capacity gains through optimal allocation of product loadings and equipment sharing across process technologies |
| Author: | Muir, Stephen H |
| Advisor: | Duane S. Boning, Lawrence M. Wein. |
| Department: | Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science; Sloan School of Management |
| Publisher: | Massachusetts Institute of Technology |
| Issue Date: | 1997 |
| Description: |
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997. Includes bibliographical references (p. 101-102). |
| URI: | http://hdl.handle.net/1721.1/42657 |
| Keywords: | Electrical Engineering and Computer Science, Sloan School of Management |
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