Semiconductor fabrication capacity gains through optimal allocation of product loadings and equipment sharing across process technologies
Author(s)
Muir, Stephen H
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Advisor
Duane S. Boning, Lawrence M. Wein.
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Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997, and Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management, 1997. Includes bibliographical references (p. 101-102).
Date issued
1997Department
Sloan School of Management; Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science, Sloan School of Management