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Ceramic microforming process

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dc.contributor.advisor Michael J. Cima. en_US Rosenthal, Matthew E. (Matthew Eric), 1971- en_US
dc.contributor.other Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. en_US 2010-01-07T21:03:14Z 2010-01-07T21:03:14Z 1998 en_US 1998 en_US
dc.description Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. en_US
dc.description Includes bibliographical references (leaves 110-113). en_US
dc.description.abstract A forming process for creating MEMS and mesoscale ceramic parts with micron scale features has been developed. This micromolding process takes advantage of clean room compatible techniques to create silicon etchings, which are used to create a silicone transfer mold. The silicone molds are used to make numerous sacrificial mold into which ceramic slurry is cast. The wax molds are sacrificed leaving green ceramic parts which are fired to produce the final component. The process was found to reproduce features as small as 2 gm with a tolerance of ± 0.8 pm over about a 100 pm length scale. The production of several parts are examined, demonstrating the ability to make stand alone MEMS and mesoscale parts with complex geometries. A non-ceramic application involving precise particle arrangement is also discussed. Observations regarding part quality, defect formation, yield issues, and process enhancement are made, along with a characterization of the dimensional stability of the process. The costs associated with processing silicon molds are also compared to competing processing techniques. This technique has generated excellent results and has potential to become a major forming tool to fill the materials selection gap in MEMS and mesoscale component design. en_US
dc.description.statementofresponsibility by Matthew E. Rosenthal. en_US
dc.format.extent 113 leaves en_US
dc.language.iso eng en_US
dc.publisher Massachusetts Institute of Technology en_US
dc.rights M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. en_US
dc.rights.uri en_US
dc.subject Materials Science and Engineering. en_US
dc.title Ceramic microforming process en_US
dc.type Thesis en_US S.M. en_US
dc.contributor.department Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. en_US
dc.identifier.oclc 47921863 en_US

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