Browsing RLE Progress Report, No. 133 (1990) by Subject "CMOS Transistors Fabricated by Focused Ion Beam Lithography"

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    • Focused Ion Beam Fabrication 

      Melngailis, John; Lezec, Henri J.; Musil, Christian R.; Mahoney, Leonard J.; Chu, Alex; e.a. (Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1990-01-01)