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Focused Ion Beam Fabrication

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Focused Ion Beam Fabrication

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Author: Melngailis, John; Musil, Christian R.; Stevens, Eugene H.; Utlaut, Mark; Geis, Michael W.; Mountain, Robert W.; Lezec, Henri J.; Kellog, Edwin
Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Date Issued: 1985-01
Description:
Contains reports on three research projects.
URI: http://hdl.handle.net/1721.1/56945
Other Identifiers: RLE_PR_127_03
Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985
Focused Ion Beam Fabrication
Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127
Keywords: Focused Ion Beam Fabrication, Focused Ion Beam System, Connections Through Focused Ion Beam Milled Vias, Mask Repair, Ion Assisted Deposition

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