Focused Ion Beam Fabrication

Home
→
Research Laboratory for Electronics (RLE)
→
RLE Progress Reports
→
RLE Progress Report, No. 127 (1985)
→
View Item

dc.contributor.author	Melngailis, John	en_US
dc.contributor.author	Musil, Christian R.	en_US
dc.contributor.author	Stevens, Eugene H.	en_US
dc.contributor.author	Utlaut, Mark	en_US
dc.contributor.author	Geis, Michael W.	en_US
dc.contributor.author	Mountain, Robert W.	en_US
dc.contributor.author	Lezec, Henri J.	en_US
dc.contributor.author	Kellog, Edwin	en_US
dc.date.accessioned	2010-07-15T21:58:50Z
dc.date.available	2010-07-15T21:58:50Z
dc.date.issued	1985-01	en_US
dc.identifier	RLE_PR_127_03	en_US
dc.identifier.uri	http://hdl.handle.net/1721.1/56945
dc.description	Contains reports on three research projects.	en_US
dc.description.sponsorship	Joint Services Electronics Program (Contract DAAG29-83-K-0003)	en_US
dc.description.sponsorship	Charles Stark Draper Laboratory (Contract DL-H-225270)	en_US
dc.description.sponsorship	International Business Machines, Inc. (Contract 3260)	en_US
dc.language.iso	en	en_US
dc.publisher	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)	en_US
dc.relation.ispartof	Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985	en_US
dc.relation.ispartof	Focused Ion Beam Fabrication	en_US
dc.relation.ispartofseries	Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127	en_US
dc.rights	Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.	en_US
dc.subject.other	Focused Ion Beam Fabrication	en_US
dc.subject.other	Focused Ion Beam System	en_US
dc.subject.other	Connections Through Focused Ion Beam Milled Vias	en_US
dc.subject.other	Mask Repair	en_US
dc.subject.other	Ion Assisted Deposition	en_US
dc.title	Focused Ion Beam Fabrication	en_US
dc.type	Technical Report	en_US