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Focused Ion Beam Fabrication

Research and Teaching Output of the MIT Community

Show simple item record Melngailis, John en_US Musil, Christian R. en_US Stevens, Eugene H. en_US Utlaut, Mark en_US Geis, Michael W. en_US Mountain, Robert W. en_US Lezec, Henri J. en_US Kellog, Edwin en_US 2010-07-15T21:58:50Z 2010-07-15T21:58:50Z 1985-01 en_US
dc.identifier RLE_PR_127_03 en_US
dc.description Contains reports on three research projects. en_US
dc.description.sponsorship Joint Services Electronics Program (Contract DAAG29-83-K-0003) en_US
dc.description.sponsorship Charles Stark Draper Laboratory (Contract DL-H-225270) en_US
dc.description.sponsorship International Business Machines, Inc. (Contract 3260) en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985 en_US
dc.relation.ispartof Focused Ion Beam Fabrication en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Focused Ion Beam Fabrication en_US
dc.subject.other Focused Ion Beam System en_US
dc.subject.other Connections Through Focused Ion Beam Milled Vias en_US
dc.subject.other Mask Repair en_US
dc.subject.other Ion Assisted Deposition en_US
dc.title Focused Ion Beam Fabrication en_US
dc.type Technical Report en_US

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