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Focused Ion Beam Fabrication

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dc.contributor.author Melngailis, John en_US
dc.contributor.author Musil, Christian R. en_US
dc.contributor.author Stevens, Eugene H. en_US
dc.contributor.author Utlaut, Mark en_US
dc.contributor.author Geis, Michael W. en_US
dc.contributor.author Mountain, Robert W. en_US
dc.contributor.author Lezec, Henri J. en_US
dc.contributor.author Kellog, Edwin en_US
dc.date.accessioned 2010-07-15T21:58:50Z
dc.date.available 2010-07-15T21:58:50Z
dc.date.issued 1985-01 en_US
dc.identifier RLE_PR_127_03 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/56945
dc.description Contains reports on three research projects. en_US
dc.description.sponsorship Joint Services Electronics Program (Contract DAAG29-83-K-0003) en_US
dc.description.sponsorship Charles Stark Draper Laboratory (Contract DL-H-225270) en_US
dc.description.sponsorship International Business Machines, Inc. (Contract 3260) en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985 en_US
dc.relation.ispartof Focused Ion Beam Fabrication en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Focused Ion Beam Fabrication en_US
dc.subject.other Focused Ion Beam System en_US
dc.subject.other Connections Through Focused Ion Beam Milled Vias en_US
dc.subject.other Mask Repair en_US
dc.subject.other Ion Assisted Deposition en_US
dc.title Focused Ion Beam Fabrication en_US
dc.type Technical Report en_US


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