Advanced Search
DSpace@MIT

Kinetic Phenomena in Thin Film Electronic Materials

Research and Teaching Output of the MIT Community

Show simple item record

dc.contributor.author Kim, Hyoung-June en_US
dc.contributor.author Palmer, Joyce E. en_US
dc.contributor.author Atwater, Harry A. en_US
dc.contributor.author Thompson, Carl V. en_US
dc.contributor.author Smith, Henry I. en_US
dc.contributor.author Jiran, Eva en_US
dc.contributor.author Tomita, Hisashi en_US
dc.contributor.author Im, James S. en_US
dc.contributor.author Schott, Stephen C. en_US
dc.contributor.author Wong, Chee C. en_US
dc.contributor.author Garrison, Stephen M. en_US
dc.contributor.author Smith, David A. en_US
dc.contributor.author Cammarata, Robert C. en_US
dc.contributor.author Clevenger, Lawrence A. en_US
dc.contributor.author Tu, King-Ning en_US
dc.contributor.author Frost, Harold J. en_US
dc.contributor.author Maorino, Cesar D. en_US
dc.contributor.author Longworth, Hai P. en_US
dc.contributor.author Privost, Lawrence en_US
dc.contributor.author Cho, Jaeshin en_US
dc.date.accessioned 2010-07-15T22:08:13Z
dc.date.available 2010-07-15T22:08:13Z
dc.date.issued 1986-01 en_US
dc.identifier RLE_PR_128_02 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/56955
dc.description Contains reports on nine research projects. en_US
dc.description.sponsorship National Science Foundation (Grant ECS85-06565) en_US
dc.description.sponsorship Semiconductor Research Corporation en_US
dc.description.sponsorship U.S. Air Force - Office of Scientific Research (Grant AFOSR-85-0154) en_US
dc.description.sponsorship National Science Foundation (Grant DMR81-19285) en_US
dc.description.sponsorship Sony International Business Machines, Inc. en_US
dc.description.sponsorship Dartmouth University en_US
dc.description.sponsorship Joint Services Electronics Program (Contract DAAG29-83-K-0003) en_US
dc.description.sponsorship Semiconductor Research Corporation en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986 en_US
dc.relation.ispartof Kinetic Phenomena in Thin Film Electronic Materials en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Kinetic Phenomena in Thin Film Electronic Materials en_US
dc.subject.other Surface-Energy-Driven Secondary Grain Growth in Ultrathin (˂1000Å) Films of Silicon en_US
dc.subject.other Surface-Energy-Driven Secondary Grain Growth in Ultrathin (˂1000Å) Films of Germanium en_US
dc.subject.other Metastable Phase Formation in Lithographically Defined Particles of Semiconductors en_US
dc.subject.other Zone Melting Recrystallization of Silicon Films en_US
dc.subject.other Zone Melting Recrystallization of Germanium Films en_US
dc.subject.other Graphoepitaxy of Si en_US
dc.subject.other Graphoepitaxy of Ge en_US
dc.subject.other Graphoepitaxy of Model Materials en_US
dc.subject.other Properties of Grain Boundaries with Controlled Orientations in Thin Silicon Films en_US
dc.subject.other Properties of Grain Boundaries with Controlled Locations in Thin Silicon Films en_US
dc.subject.other Kinetics of Silicide Formation at Refractory Metal-Silicon Contacts en_US
dc.subject.other Modeling of Grain Formation in Thin Films en_US
dc.subject.other Modeling of Grain Growth in Thin Films en_US
dc.subject.other Grain Growth in Thin Films of Aluminum en_US
dc.subject.other Thin and Narrow Metallic Interconnects en_US
dc.title Kinetic Phenomena in Thin Film Electronic Materials en_US
dc.type Technical Report en_US


Files in this item

Name Size Format Description
RLE_PR_128_02.pdf 413.3Kb PDF

This item appears in the following Collection(s)

Show simple item record

MIT-Mirage