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Focused Ion Beam Fabrication

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dc.contributor.author Melngailis, John en_US
dc.contributor.author Lezec, Henri J. en_US
dc.contributor.author Mahoney, Leonard J. en_US
dc.contributor.author Jacobs, Jarvis B. en_US
dc.contributor.author Lowther, Rex E. en_US
dc.contributor.author Musil, Christian R. en_US
dc.contributor.author Antoniadis, Dimitri A. en_US
dc.contributor.author Shedd, Gordon M. en_US
dc.contributor.author Dubner, Andrew D. en_US
dc.contributor.author Thompson, Carl V. en_US
dc.contributor.author Barrett, J. L. en_US
dc.contributor.author Thompson, W. B. en_US
dc.date.accessioned 2010-07-16T03:39:42Z
dc.date.available 2010-07-16T03:39:42Z
dc.date.issued 1987-01 en_US
dc.identifier RLE_PR_129_03 en_US
dc.identifier.uri http://hdl.handle.net/1721.1/57005
dc.description Contains reports on five research projects. en_US
dc.description.sponsorship DARPA/Naval Electronic Systems Command (Contract MDA-903-85-C-0215) en_US
dc.description.sponsorship Charles Stark Draper Laboratory (Contract DL-H-261827) en_US
dc.description.sponsorship U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073) en_US
dc.description.sponsorship Nippon Telephone and Telegraph en_US
dc.description.sponsorship Hitachi Central Research Laboratory en_US
dc.language.iso en en_US
dc.publisher Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) en_US
dc.relation.ispartof Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1987 en_US
dc.relation.ispartof Focused Ion Beam Fabrication en_US
dc.relation.ispartofseries Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129 en_US
dc.rights Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. en_US
dc.subject.other Focused Ion Beam Fabrication en_US
dc.subject.other Focused Ion Beam Program en_US
dc.subject.other Fabrication of Graded Channel FETs in GaAs en_US
dc.subject.other Fabrication of Graded Channel FETs in Si en_US
dc.subject.other Ion Induced Deposition en_US
dc.subject.other Focused Ion Beam Microsurgery for Electronics en_US
dc.subject.other Measurement of Beam Profile en_US
dc.title Focused Ion Beam Fabrication en_US
dc.type Technical Report en_US


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