Focused Ion Beam Fabrication

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dc.contributor.author	Melngailis, John	en_US
dc.contributor.author	Lezec, Henri J.	en_US
dc.contributor.author	Mahoney, Leonard J.	en_US
dc.contributor.author	Jacobs, Jarvis B.	en_US
dc.contributor.author	Lowther, Rex E.	en_US
dc.contributor.author	Musil, Christian R.	en_US
dc.contributor.author	Antoniadis, Dimitri A.	en_US
dc.contributor.author	Shedd, Gordon M.	en_US
dc.contributor.author	Dubner, Andrew D.	en_US
dc.contributor.author	Thompson, Carl V.	en_US
dc.contributor.author	Barrett, J. L.	en_US
dc.contributor.author	Thompson, W. B.	en_US
dc.date.accessioned	2010-07-16T03:39:42Z
dc.date.available	2010-07-16T03:39:42Z
dc.date.issued	1987-01	en_US
dc.identifier	RLE_PR_129_03	en_US
dc.identifier.uri	http://hdl.handle.net/1721.1/57005
dc.description	Contains reports on five research projects.	en_US
dc.description.sponsorship	DARPA/Naval Electronic Systems Command (Contract MDA-903-85-C-0215)	en_US
dc.description.sponsorship	Charles Stark Draper Laboratory (Contract DL-H-261827)	en_US
dc.description.sponsorship	U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073)	en_US
dc.description.sponsorship	Nippon Telephone and Telegraph	en_US
dc.description.sponsorship	Hitachi Central Research Laboratory	en_US
dc.language.iso	en	en_US
dc.publisher	Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)	en_US
dc.relation.ispartof	Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1987	en_US
dc.relation.ispartof	Focused Ion Beam Fabrication	en_US
dc.relation.ispartofseries	Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129	en_US
dc.rights	Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.	en_US
dc.subject.other	Focused Ion Beam Fabrication	en_US
dc.subject.other	Focused Ion Beam Program	en_US
dc.subject.other	Fabrication of Graded Channel FETs in GaAs	en_US
dc.subject.other	Fabrication of Graded Channel FETs in Si	en_US
dc.subject.other	Ion Induced Deposition	en_US
dc.subject.other	Focused Ion Beam Microsurgery for Electronics	en_US
dc.subject.other	Measurement of Beam Profile	en_US
dc.title	Focused Ion Beam Fabrication	en_US
dc.type	Technical Report	en_US