Kinetic Phenomena in Thin Film Electronic Materials

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Kinetic Phenomena in Thin Film Electronic Materials

Author: Ajuria, Sergio; Quek, Hui Meng; Thompson, Carl V.; Smith, Henry I.; Kim, Hyoung-June; Atwater, Harry A.; Floro, Jerrold A.; Frost, Harold J.; Palmer, Joyce E.; Chong, Tow; Fonstad, Clifton G.; Im, James S.; Tomita, Hisashi; Smith, David A.; Jiran, Eva; Cammarata, Robert C.; Clevenger, Lawrence A.; Tu, King-Ning; Cho, Jaeshin; Kahn, Hal; Longworth, Hai P.; Ro, Jaesang; Dubner, Andrew D.; Melngailis, John

Citable URI: http://hdl.handle.net/1721.1/57032

Publisher: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)

Date Issued: 1987-01-01

Description:

Contains reports on seven research projects.

URI: http://hdl.handle.net/1721.1/57032

Other Identifiers: RLE_PR_130_02

Is Part Of: Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1987
Kinetic Phenomena in Thin Film Electronic Materials

Series/Report no.: Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 130

Keywords: Kinetic Phenomena in Thin Film Electronic Materials, Grain Growth in Thin Films, Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems, Thin Film Zone Melting Recrystallization of Silicon, Capillary Instabilities in Thin Solid Films, Kinetics of Thin Film Silicide Formation, Reliability of Interconnects, Microstructures of Interconnects, Focussed Ion Beam Induced Deposition

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