| dc.contributor.author | Anderson, Erik H. | en_US |
| dc.contributor.author | Burkhardt, Martin | en_US |
| dc.contributor.author | Carter, James M. | en_US |
| dc.contributor.author | Chu, William | en_US |
| dc.contributor.author | Early, Kathleen R. | en_US |
| dc.contributor.author | Ku, Yao-Ching | en_US |
| dc.contributor.author | Quek, Hui Meng | en_US |
| dc.contributor.author | Moel, Alberto | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Yen, Anthony T. | en_US |
| dc.contributor.author | Plotnik, Irving | en_US |
| dc.contributor.author | Kawata, Hiroaki | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Field, Stuart B. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Licini, Jerome C. | en_US |
| dc.contributor.author | Meirav, Udi | en_US |
| dc.contributor.author | Park, Samuel L. | en_US |
| dc.contributor.author | Scott-Thomas, John H. F. | en_US |
| dc.contributor.author | Bagwell, Phillip F. | en_US |
| dc.contributor.author | Orlando, Terry P. | en_US |
| dc.contributor.author | Ismail, Khalid | en_US |
| dc.contributor.author | Meyer, Paul | en_US |
| dc.contributor.author | Shahidi, Ghavam G. | en_US |
| dc.contributor.author | The, Siang-Chun | en_US |
| dc.contributor.author | Ajuria, Sergio | en_US |
| dc.contributor.author | Floro, Jerrold A. | en_US |
| dc.contributor.author | Thompson, Carl V., III | en_US |
| dc.contributor.author | Palmer, Joyce E. | en_US |
| dc.contributor.author | Canizares, Claude R. | en_US |
| dc.date.accessioned | 2010-07-16T04:02:42Z | |
| dc.date.available | 2010-07-16T04:02:42Z | |
| dc.date.issued | 1988-01-01 to 1988-12-31 | en_US |
| dc.identifier | RLE_PR_131_01_01s_01 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57073 | |
| dc.description | Contains table of contents for Part I, table of contents for Section 1 and reports on fourteen research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAL03-86-K-0002) | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAL03-89-C-0001) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS-87-09806) | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation (Contract 87-SP-080) | en_US |
| dc.description.sponsorship | Hampshire Instruments Corporation | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS-85-03443) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Grant AFOSR-88-0304) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS-85-06565) | en_US |
| dc.description.sponsorship | X-Opt., Incorporated | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Grant AFOSR-85-0154) | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration (Grant NGL22-009-683) | en_US |
| dc.description.sponsorship | KMS Fusion, Incorporated | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1988 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics And Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Submicron Structures Technology and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 131 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structures Technology | en_US |
| dc.subject.other | Submicron Structures Research | en_US |
| dc.subject.other | Submicron Structures Laboratory | en_US |
| dc.subject.other | Microfabrication at Linewidths of 100nm and Below | en_US |
| dc.subject.other | Improved Mask Technology For X-Ray Lithography | en_US |
| dc.subject.other | Optical Projection Lithography Using Lenses of High Numerical Aperture | en_US |
| dc.subject.other | Electronic Conduction In One-Dimensional Semiconductor Devices | en_US |
| dc.subject.other | Surface Superlattice Formation In Silicon Inversion Layers Using 0.2μm-Period Grating-Gate Field-Effect Transistors | en_US |
| dc.subject.other | Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors | en_US |
| dc.subject.other | One-Dimensional Subbands in GaAs/AIGaAs Quantum Wires | en_US |
| dc.subject.other | Mobility Modulation in GaAs/AIGaAs Quantum Wires | en_US |
| dc.subject.other | Electron Transport In Si MOSFETs With Deep-Submicron Channel Lengths | en_US |
| dc.subject.other | Crystalline Films On Amorphous Substrates | en_US |
| dc.subject.other | Epitaxy via Surface-Energy-Driven Grain Growth | en_US |
| dc.subject.other | Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy | en_US |
| dc.subject.other | Submicrometer-Period Gold Transmission Gratings for Atom-Beam Interferometry | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy | en_US |
| dc.subject.other | Soft X-Ray Interferometer Gratings | en_US |
| dc.title | Submicron Structures Technology and Research | en_US |
| dc.type | Technical Report | en_US |
